Trench insulation structures and methods

ABSTRACT

A method of depositing dielectric material into sub-micron spaces and resultant structures is provided. After a trench is etched in the surface of a wafer, a liner layer preferably is deposited into the trench. An anisotropic plasma process is then performed on the trench. A silicon layer may be deposited on the base of the trench during the plasma process, or the plasma can treat the liner layer. The trench is then filled with a spin-on precursor. A densification or reaction process is then applied to convert the spin-on material into an insulator, and oxidizing the silicon rich layer on the base of the trench. The resulting trench has a consistent etch rate from top to bottom of the trench.

REFERENCE TO RELATED APPLICATIONS

This application is related to and incorporates by reference in theirentireties the following: U.S. application Ser. No. 10/782,997, filedFeb. 19, 2004 [attorney docket no.: MICRON.278A] and U.S. applicationSer. No. 10/925,715, filed Aug. 24, 2004 [attorney docket no.:MICRON.289A].

FIELD OF THE INVENTION

This invention relates generally to the field of integrated circuitfabrication, and more specifically to trench isolation and methodstherefor.

BACKGROUND OF THE INVENTION

Integrated circuit (IC) manufacturers increasingly face difficultieswith scaling and insulation between components with ever decreasingfeature sizes. Even though packing transistors closer is important tothe concept of increasing IC speed and decreasing size, they must stillbe electrically separated from each other. One method of keepingtransistors separate from each other is known as trench isolation.Trench isolation is the practice of creating trenches in the substratein order to separate electrical components on the chip. The trenches aretypically filled with an insulator that will prevent cross-talk betweentransistors.

Shallow trench isolation (STI), which is becoming quite prevalent inmodern IC design, uses trenches that are substantially narrower thanfield isolation elements created by older isolation technology, such asLOCal Oxidation of Silicon (LOCOS). The size can vary, but a trench lessthan one half of a micron wide has become quite common. STI also offerssmaller channel width encroachment and better planarity thantechnologies used in earlier IC generations. Good insulating trenchesare important for devices such as dynamic random access memory (DRAM),which uses trenches to separate transistors of individual memory cells.

During the deposition process and subsequent steps, however, the trenchwalls can be damaged. A silicon nitride liner, which has substantialstress-relieving capabilities for the sidewalls of the trench, may beadded before trench fill. Such liners are often used for high densityICs, such as DRAM chips, to protect bulk silicon during subsequentprocess steps.

In order to provide good isolation properties, the trench is thentypically filled with an insulator such as a form of silicon oxide. Theoxide can be deposited in a number of methods, such as CVD, sputtering,or a spin-on deposition process. Spin-on insulators are becoming moreprevalent, because they fill low points first and thus fill trenchesmore evenly. Additionally, spin-on deposition (SOD) dielectricmaterials, which often form silicon oxide after being reacted, carryless risk of voids in the resulting insulating material than otherdeposition processes. SOD precursors are deposited as a liquid, and thenreacted to form silicon oxide using a high temperature oxidationprocess.

However, the use of SOD insulators in the trench can also raise issuesupon the conversion from liquid precursor to its final insulating form.Three interrelated problems arise upon the conversion from precursor toinsulation material: poor rebonding, volume shrinkage, and wet etch rategradients. Upon densification, the insulation material bonds to thewalls of the trench, but if the bonds are not very strong, the insulatorwill be easily etched near the side of the trench during subsequent etchprocesses. These bonds and the general crystal structure can be weakeneddue to the volume shrinkage during densification of the SOD materialpulling the SOD material away from the sidewalls. This can change theangles in the crystal structure, resulting in easily broken bonds andhigh etch rates.

During fabrication of a semiconductor device, the trench is typicallyexposed to several etching steps. If the trench fill material hasdifferent etch rates in different regions, it will be hard to controlthe etch processes to avoid removing the trench fill. This problem isparticularly true at the walls of the trench, where the fill material isless dense due to volume shrinkage. The etch process can create voidsalong the walls of the trench, reducing the effectiveness of the trenchstructure as an isolating device.

Problems relating to the formation of the densified SOD material arecommon and can cause significant problems for IC designers. Accordingly,better methods of SOD integration are needed for trenches.

SUMMARY OF THE INVENTION

In a first aspect of the invention, a method of forming an isolationstructure is disclosed. The method comprises forming a recess within asubstrate and depositing an insulating liner within the recess. Therecess is exposed to a plasma process after depositing the insulatingliner to form a silicon rich layer at a base of the recess. A spin-ondeposition (SOD) precursor is deposited after exposing the recess to theplasma process. The SOD precursor is converted to an insulating layer,wherein converting the SOD precursor includes expanding the silicon richlayer.

In another aspect of the invention, an electrical isolation structure isdisclosed. The isolation structure comprises a trench formed in asubstrate and a thermal oxide in a base of the trench. The thermal oxideis substantially thinner along the walls than along the base. A spin-ondielectric overlies the thermal oxide.

A method of forming a computer memory device is disclosed in anotheraspect of the invention. The method comprises forming a trench in asubstrate and anisotropically depositing a silicon-based layer along abase of the trench. An insulator material is deposited into the trenchafter depositing the silicon-based layer. The silicon-based layer is atleast partially converted into silicon oxide during or after depositingthe insulator material.

In another aspect of the invention, a method of improving density of aspin-on dielectric is disclosed. The method comprises providing a linerwithin a recess in a substrate. Silicon is deposited on at least part ofthe liner using a primarily anisotropic plasma deposition process. Aspin-on deposition (SOD) dielectric precursor is deposited within theliner.

In another aspect of the invention, an integrated circuit having anelectrical isolation structure is disclosed. The structure comprises atrench formed in a recess. An insulating liner overlies a floor andsidewalls of the trench. A thermal oxide layer is preferentially formedon the floor of the trench. The trench further comprises a spin-ondeposition dielectric over the thermal oxide layer within the trench.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other aspects of the invention will be better understood fromthe Detailed Description of the Preferred Embodiments and from theappended drawings, which are meant to illustrate and not to limit theinvention, and wherein:

FIG. 1 is a schematic, cross-sectional view of the substrate with a thin“pad oxide” grown over the surface of the substrate, a thicker layer ofsilicon nitride (Si₃N₄), and a photoresist mask in accordance with astarting point for preferred embodiments of the present invention.

FIG. 2 is a schematic, cross-sectional view of the substrate of FIG. 1after a trench has been formed.

FIG. 3 is a schematic, cross-sectional view of the substrate of FIG. 2with an insulating layer lining the trench.

FIG. 4A is a schematic, cross-sectional view of the substrate of FIG. 3with a silicon rich layer selectively deposited over horizontal surfacesin and surrounding the trench.

FIG. 4B is a schematic, cross-sectional view of the substrate of FIG. 3with horizontal surfaces of the insulating liner selectively convertedto a silicon rich layer.

FIG. 5 is a schematic, cross-sectional view of the substrate of FIG. 4Awith a layer of spin-on dielectric precursor material filling thetrench.

FIG. 6 is a schematic, cross-sectional side view of the substrate ofFIG. 4 after a densification and oxidation process.

FIG. 7 is a schematic, cross-sectional side view of the substrate ofFIG. 6 after an etch back step.

FIG. 8 is a schematic cross-sectional side view of the substrate of FIG.4B after filling, densification/oxidation, and etch back.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

It has been found that the undesirable etch rate gradients can beattributed to the volume shrinkage of insulation materials in trenchesand the associated weak crystal structure. Normal shrinkage of spin-ondeposition (SOD) dielectric materials is believed to cause increasedtensile bond stress and a weakened interface between densified SODdielectrics and trench walls.

Thus, the inventors have found it desirable to anisotropically treat thebase of the trench. In one embodiment, a silicon rich base layer isdeposited over the base of the trench. In another embodiment, aninsulating liner layer is treated using an anisotropic plasma processwhich produces a thin silicon rich portion of the liner layer. In eitherof the above embodiments, the silicon rich layer will expand upondensification of the spin-on deposition material and at least partiallycompensate for the volume shrinkage of the SOD material.

In a preferred embodiment, described in more detail below, the processbegins with the definition of an opening or void in a semiconductorsubstrate. The described embodiment is a shallow trench isolation (STI)structure, but the process can be used for filling other trench-typestructures. An insulation liner, such as silicon nitride, can then beformed within the trench. An anisotropic plasma process forms a siliconrich material at the base of the trench. A SOD precursor is thendeposited over the substrate and into the trenches. The SOD material isdensified, preferably in a steam ambient environment, which expands anyexposed silicon present in the trench while converting it to siliconoxide.

Forming a Trench

An introductory step is the creation of a trench, preferably for shallowtrench isolation (STI). The trench can be of varying widths, but in apreferred embodiment, the trench is less than a micron wide. As shown inFIG. 1, a semiconductor substrate 10, e.g., a silicon wafer, is providedand a thin “pad” oxide 12 is thermally grown on the substrate. In someembodiments, a thicker insulating layer 14, preferably silicon nitrideor Si₃N₄, is formed over the pad oxide 12. The nitride 14 is preferablyformed by chemical vapor deposition (CVD). This nitride layer 14 acts asa stop for a subsequent etch back, such as a CMP process. Exemplarythickness ranges are between about 30 Å and 100 Å for the pad oxide 12and between about 200 Å and 1500 Å for the nitride layer 14.

As shown in FIG. 1, a photoresist mask 16 is applied to the substrate 10in order to etch the trench. Traditional lithography techniques arepreferably used to form the photoresist mask 16. Using the photoresistmask 16, a recess, preferably a trench for isolation, is formed in thesubstrate. After the trench is etched, the photoresist mask 16 of FIG. 1is removed by a conventional resist strip process. The trench depth ispreferably between about 1,000 Å and 10,000 Å, more preferably betweenabout 2,500 Å and 6,000 Å. The trench can also be formed through the useof a hard mask or by other methods. The skilled practitioner willappreciate that the trench can be formed by several differentprocedures.

The trench is preferably etched by an anisotropic etch, i.e. adirectional etch, which produces relatively straight, verticalsidewalls. An exemplary etch process is reactive ion etch (RIE). Asshown in FIG. 2, this method is quite accurate and straight. However,RIE can also damage the edges of transistor active areas, defined by thesidewalls 18 of the trench. In one embodiment, the sidewalls 18 and base19 of the trench are oxidized, forming a thin oxide layer (not shown) inorder to repair any damage from the anisotropic etch process.

Applying a Liner Layer

As seen in FIG. 3, an insulating liner layer 20 is deposited to line thetrench walls 18 and the base 19, or floor, of the trench. Preferably,though not necessarily, the liner layer 20 is a silicon containingmaterial. In a preferred embodiment, the liner layer 20 is a siliconnitride. The liner 20 can also act as a barrier to prevent stressing andoxidation of the substrate during subsequent processing. The liner layer20 can be deposited by any of a variety of deposition methods, includingCVD, atomic layer deposition (ALD), and sputtering. An additional methodof deposition is ion-metal plasma deposition, a sputtering process withmagnetic collimation. While silicon nitride deposited by CVD isdescribed here, other materials and deposition processes can be used toform a liner layer.

In a preferred embodiment, the liner layer 20 has a thickness of betweenabout 50 Å and 100 Å, more preferably between about 65 Å and 75 Å. Thethickness of the insulation layer 20 is typically easily controlled,usually by the length of the deposition process, deposition precursorsor other factors.

Plasma Treatment

In order to improve the trench fill process, a plasma treatment isperformed upon the trench, preferably after the liner layer 20 has beendeposited. In a preferred embodiment, an anisotropic process isperformed, wherein the base 19 is more affected by the plasma treatmentthan the walls 18 of the trench. The plasma treatment process preferablyanisotropically forms a silicon rich layer at the base 19 of the trench.In one embodiment, a silicon layer is deposited preferentially at thebottom or base 19 of the trench. However, plasma treatment withoutdeposition is also beneficial.

A description of a silicon nitride layer with a silicon rich exteriorcan be found in application Ser. No. 10/925,715, filed Aug. 24, 2004,entitled “Liner For Shallow Trench Isolation”, filed by Trivedi et al.,which is hereby incorporated by reference herein. That applicationdiscloses several different conformal liner layers with varyingcomposition to improve rebonding between the walls of the trench and thedensified insulation material. The conformal liner layers of the '715application are preferably formed through a deposition process thatprovides varying levels of silicon content by altering the flow rates ofthe source gases. In preferred embodiments of that invention, thenitride content of the liner layer is graded on all sides of the liner,with the highest nitrogen levels near the walls and base of the trench,and lower towards the interior of the trench. This provides for improvedrebonding and compression as the silicon rich layer expands duringoxidation.

However, when the insulation material is compressed from three sides,problems can arise with different material densities and etch ratesacross the trench when using the process of the '715 application. Highetch rates at the bottom of the trench could yield an unfilled trenchafter exposure to wet cleans. Thus, in preferred embodiments of thepresent invention, an anisotropic process is used to preferentiallytreat the base of the trench.

In a preferred embodiment, an in situ plasma is used for the anisotropicplasma process. Many plasma chambers can be used to treat the trench.One preferred chamber is the Speed™ high density plasma chambercommercially available from Novellus, Inc. of San Jose, Calif. Dependingon reactant gases selected, the Speed™ chamber can deposit or simplytreat the trench with plasma.

In a preferred embodiment seen in FIG. 4A, a silicon rich base layer 24is deposited on the base 19 of the trench during the plasma process.Because of the anisotropic nature of the plasma process, an uppersilicon rich layer 26 will also be deposited on other horizontalsurfaces. Typically, the upper silicon rich layer 26 will have athickness that is similar to the silicon rich base layer 24. Inpreferred embodiments, very little silicon is deposited on the verticalsidewalls 18 of the trench due to the anisotropic nature of the plasmadeposition process. Thus, the silicon rich layer is not shown along thevertical walls, but it will be understood that a lesser thickness ofsilicon rich material (preferably less than one third, more preferablyless than one fifth) compared to the thickness of the silicon rich baselayer 24. The upper silicon rich layer 26 may be removed beforedeposition of the SOD precursor. If the upper silicon rich layer 26remains, it will form silicon oxide during the densification of the SODmaterial, but such overlying thermal oxide will not form part of thefinal structure.

In a preferred embodiment, the base layer 24 is a silicon layer, such aspolysilicon or amorphous silicon. However, other materials, such assilicon rich silicon oxide (more Si than stoichiometric SiO₂), can beanisotropically deposited in the trench. Preferably, the ratio ofsilicon in the deposited layer is high enough so that upon densificationof a spin-on deposition precursor, oxidation causes the base layer 24 toexpand vertically.

Skilled practitioners will appreciate that there are several methods ofanisotropically depositing a silicon rich base layer 24. Using theSpeed™ high density plasma chamber, the flow rates of precursors arebalanced with the amount of plasma treatment of the horizontal surfacesdesired.

Exemplary processes for the Speed™ high density plasma chamber usesilane (SiH₄), as the silicon precursor, and oxygen (O₂). Flow rates forsilane range from between about 1 sccm to 100 sccm, more preferablybetween about 15 sccm and 85 sccm. Flow rates for oxygen are preferablybetween about 0 sccm and 15 sccm, more preferably between about 1 sccmand 10 sccm. Other gases can be used to stabilize and tune the plasma.Preferred gases for this include helium, a helium/hydrogen combination,and argon. Flow rates vary depending upon the precursor gas selected andthe flow rates of the other precursor gases. The skilled artisan willappreciate that the silicon rich base layer can be deposited using anyof a variety of chambers, each having slightly different settings andparameters.

In a preferred embodiment, the thickness of the deposited silicon richlayer 24 is between about 50 Å and 250 Å, more preferably between about100 Å and 150 Å. More generally, the thickness of this layer will dependon the selected trench depth.

Plasma treatment without deposition is also helpful to the trench fillprocess. This process is illustrated in FIG. 4B. With a plasma treatmentprocess alone, nitrogen from the silicon nitride liner layer 20 isgettered away from the surface of the liner layer 20, preferentially onthe base 19 of the trench and other horizontal surfaces. While therewill be some effect on vertical walls, vertical walls are preferablysubstantially less affected by the plasma treatment. This will form asilicon rich layer 27 near the surface of the liner layer 20 over thebase 19 of the trench, as well as forming a silicon rich layer 29 onother horizontal surfaces of the liner layer 20. Such a silicon richbase layer 27 near the spin-on deposition (SOD) precursor improvesre-bonding of the densified SOD material to the liner layer andvertically displaces the SOD material from only one side. In preferredembodiments illustrated in FIG. 4B, the anisotropic plasmapreferentially affects the horizontal surfaces, with the verticalsurfaces being less affected by the plasma treatment process. The linerlayer 20 along the trench walls 18 and other vertical surfaces aresignificantly less altered by the plasma treatment process.

In a preferred plasma treatment without deposition, several reactantscan be used, including oxygen, hydrogen, and inert bombardment such asby helium radicals. Chambers can be used to treat the plasma with orwithout deposition, so the chamber can be the same as mentioned above.In a preferred embodiment, an oxygen source, preferably O₂, is providedwith a flow rate of between about 0 sccm and 50 sccm, more preferablythe flow rate is between about 5 sccm and 25 sccm. Hydrogen ispreferably provided in the form of H₂, with a flow rate of between about0 sccm and 500 sccm, more preferably between about 50 sccm and 100 sccm.Helium is used primarily to tune the pressure and stabilize the plasma,with flow rates preferably between about 0 sccm and 500 sccm. Argon mayalso be used in treating the trench, with flow rates of between about 50sccm and 100 sccm. Preferably, the power is between about 1000 W and4000 W, more preferably between 3000 W and 4000 W.

In a preferred embodiment, the thickness of the gettered silicon richlayer 27 is between about 3 Å and 10 Å, more preferably between about 5Å and 8 Å.

An anisotropic plasma process, either with or without deposition, formsa silicon rich layer on the base of the trench that helps to improve therebonding and crystal structure of the SOD material. Because the processis anisotropic, the vertical surfaces are substantially less affected bythe plasma process. This enables a one-directional (vertical)compensation for volume shrinkage.

Trench Fill Process

After the plasma treatment and/or deposition of a silicon rich layer,the trench is filled with an insulator. Preferably the insulator is anon-conductive oxide, such as silicon oxide. Preferably, a spin-ondeposition precursor is deposited over the substrate and within thetrench.

In FIG. 5, an insulator precursor material 30 has been deposited withinthe trench. The embodiment illustrated in FIGS. 5-7 uses the embodimentof FIG. 4A. As mentioned above, the upper silicon rich layer 26 outsideof the trench may be removed or it may remain over the liner layer. Itis illustrated as having been removed, but in a preferred embodiment ofthe invention, the upper silicon rich layer 26 is oxidized during theSOD densification process. In any case, such upper thermal oxide, ifpresent, would be removed during a subsequent etch back. A spin-ondeposition process is preferably used to deposit the precursor 30 intothe remaining space in the trench, as shown in FIG. 5. The thickness ofthe insulation precursor 30 will vary based upon the size of the trench,but in the illustrated embodiment the thickness of the material ispreferably between 2500 Å and 5500 Å, more preferably between 3000 Å and4500 Å.

Spin-on deposition uses liquid materials dispensed in a stream of fixedvolume or dripped on the substrate after formation of the isolationtrenches. The wafer is rapidly spun, which spreads the liquid uniformlyover the surface of the wafer after filling the low points on the wafer.An example of a spin-on material is Spinfil™ commercially available fromClariant (Japan) K.K.—Life Science & Electronic Chemicals of Tokyo,Japan. This product is a polysilazane based inorganic spin-on dielectricprecursor. Another preferred class of SOD materials are silsesquioxanebased materials. Two varieties of these products are available, organicand inorganic. Hydrogen silsesquioxane (HSQ) is a commonly availableinorganic SOD material and methyl silsesquioxane (MSQ) is a commoninorganic SOD material. However, the skilled practitioner willappreciate that many dielectric precursor materials can be used forthese purposes.

Once the insulating precursor 30 has been deposited into the trench, theprecursor 30 is converted to an insulator, preferably an oxide.Clariant's Spinfil™ SOD precursor, based upon perhydrosilazane (SiH₂NH),has a recommended conversion/densification recipe as follows:

1) 3 min of hot plate baking at 150° C.,

2) 30 min at 700-800° C. in steam ambient

3) Annealing for STI at 800-1000° C. in dry oxygen.

However, this process was found problematic for trenches that are verysmall, particularly where trenches of a variety of widths across thesubstrate are to be filled. A more preferred densification process isdescribed in an U.S. patent application by Smythe, et al. (filed Feb.19, 2004, application Ser. No. 10/782,997), which is hereby incorporatedby reference. The densification process of that application uses aramped temperature process. A prepared wafer is placed in a chamber. Thewafer is preferably heated to an initial temperature of between about200° C. and 600° C., more preferably between 300° C. and 500° C.Preferably, steam is then turned on in the chamber. From the initialtemperature, the heat ramps up to a target temperature betweenapproximately 800° C. and 1200° C., more preferably between 900° C. and1100° C., and most preferably between 950° C. and 1050° C. The increaseof the temperature in the chamber is stopped when it gets to this targettemperature. The temperature can increase approximately between about 3°C. per minute to 25° C. per minute, more preferably between about 8° C.and 20° C. During the escalation of the temperature, the wafer is in anoxidizing environment, preferably an ambient steam environment. Afterthe temperature is ramped up, the wafer is annealed for approximately 10to 40 minutes, more preferably between 15 min and 35 min, at thetemperature plateau on steady state. In the preferred embodiment, thewafer is annealed in a second oxidizing environment, preferably in a dryoxygen (O₂) environment. Finally, after the process is done, the waferis removed from the chamber.

In this process the steam reacts with the polysilazane on the heatedsubstrate. As the temperature rises, the reaction begins to increase therate of oxidation. The chemical reaction associated with the densifyingprocess of the preferred spin-on dielectric, polysilazane, is shownbelow:Si_(x)N_(y)H_(z)+H₂O→SiO₂+H₂+NH₃

Additionally, the silicon rich base layer 24 (FIG. 5) is oxidized duringthe process of converting the precursor 30 into the insulator 40.Particularly for the anisotropically deposited silicon layer of FIG. 4A,the steam environment will encourage the expansion of the base layer.This expansion is seen in FIG. 6, where it can be seen that the oxidizedbase layer 34 is larger than the prior silicon rich base layer 24 (FIG.5). This expansion serves to compensate for the volume shrinkage of theSOD material during densification.

Due to the vertical expansion of the oxidation of the silicon rich layerfrom only one direction, the spin-on oxide 40 is not compressed by theexpansion. This leads to consistent etch rates across the densified SODoxide 40, particularly from wall to wall across the top surface. Thethermally oxidized silicon oxide layer 34 has a etch rate that istypical of thermal silicon oxide and thus different from SOD, butbecause it is buried it is not exposed to wet etches, unlike thesidewall thermal oxide of the '715 application.

When the silicon rich layer 27 (FIG. 4B) is formed by gettering duringthe plasma process, rather than deposition, the silicon rich layer 27will oxidize, expand and compensate, to an extent, for the volumeshrinkage of the SOD material. This can be seen in FIG. 8. Theinsulating layer 20 is thinner on the horizontal surfaces, including atthe base of the trench, due to the oxidation of the gettered siliconrich layer 27 (FIG. 4B). In a preferred embodiment, the oxidized region37 of the gettered silicon rich layer 27 (FIG. 4B) is thinner than theoxidized region 34 formed from deposited silicon in FIG. 7. Preferably,the thickness of the thermal oxide 37 formed from the gettered siliconrich layer 27 (FIG. 4B) is between about 6 Å and 25 Å, more preferablybetween about 10 Å and 20 Å.

The trench and the surrounding region will typically be subjected toseveral subsequent etching processes. As seen in FIG. 7, the oxide 40 inthe trench is preferably etched back with a chemical mechanicalpolishing (CMP) or other etch back process, which preferably stops onthe liner layer 20 or the underlying nitride layer 14.

The trench will typically face wet cleans and gate cleans duringsubsequent fabrication steps. Using described embodiments, voids at thesides and top of the trench fill are reduced substantially. For example,during a DRAM fabrication process, a wet clean is performed to removeany oxide from the surface of exposed silicon nitride layers. Typically,a hydrofluoric acid (HF) solution is used to perform the wet clean. TheHF solution preferably has a dilution ratio of about 25 parts water to 1part HF. A gate clean is typically then performed to expose the activeareas of the transistors in the DRAM array. The gate clean may beperformed with a wet etch process or a dry etch process. In either case,the insulator in the trench preferably has consistent etch rateslaterally across the SOD material. This leads to a elimination orsubstantial reduction in pitting, or “dishing”, that leads tonon-planarity issues for subsequent processing.

Structure

An embodiment is seen in FIG. 7 after an etch back of the trench fillmaterial 40. Through the use of the spin-on deposition process, thetrench is preferably filled without voids, which can negatively affectthe isolation effects of the trench. The spin-on precursor has beenoxidized to form a SOD oxide 40, which provides excellent insulation.The silicon oxide adheres well to the surface of the trench walls due tothe compression from the expansion of the silicon rich base layer, whichhas been oxidized to form a relatively nitrogen-free oxide layer 34.

Depending on the densification process, the nitrogen content of thetrench fill materials can vary. However, in one embodiment, there is afirst layer of silicon oxide 34, which has essentially no nitrogen. Thisoxide layer 34, preferably thermal oxide, is substantially thinner alongthe vertical walls 18 of the trench than along the base of the trench.Preferably, the oxide 34 along the walls 18 has a thickness of less than33% of the thickness of the oxide along the base 19 of the trench, morepreferably less than 20%. This oxide 34 was preferably formed byoxidation of the silicon rich base layer 24 (FIG. 5). Preferably, thefirst silicon oxide layer 34 has a thickness of between about 50 Å and250 Å, more preferably between about 100 Å and 200 Å. A second layer ofsilicon oxide 40 is over the first layer 24. The second layer containsnitrogen and other contaminants, which are remnants of the SOD precursormaterial. Preferably, the second silicon oxide layer has a thickness ofbetween about 2000 Å and 4000 Å, more preferably between about 3000 Åand 3500 Å

In another embodiment illustrated in FIG. 8, the lower silicon layer isa very thin oxide layer 37. This is formed by oxidizing a silicon richregion of the liner layer 20 created by gettering nitrogen in a topportion of the base region of a silicon nitride liner layer by ananisotropic plasma process (FIG. 4B). In a preferred embodiment, thisthermally oxidized layer 37 is between about 6 Å and 25 Å, morepreferably between about 10 Å and 20 Å.

The oxide layers are preferably separated from the substrate by theliner layer 20. Preferably the liner layer is silicon nitride, but othermaterials may also be used as the liner layer 20. The liner layer 20 maybe partially oxidized near the base of the trench.

In an unpictured embodiment, a smoothing oxide layer is positionedbetween the liner layer 20 and the substrate 10 along the sidewalls 18and base 19 of the trench resulting from oxidizing the surfaces of thetrench before depositing a liner layer 20. The smoothing oxide layerpreferably has a thickness of between about 30 Å and 100 Å. Theoxidation of the trench walls 18 and base 19 serves to repair damagefrom the trench formation. The smoothing oxide layer also protects theactive areas in the substrate 10 from damage that might be caused duringprocessing. A similar oxide layer can be formed in other embodimentsdescribed herein.

The isolation structures of the described embodiments preferably have aconsistent etch rate laterally across the trench. Thus, the trencheshave reduced dishing and pitting across the surface of the insulationmaterial.

It will be appreciated by those skilled in the art that variousomissions, additions and modifications may be made to the methods andstructures described above without departing from the scope of theinvention. All such modifications and changes are intended to fallwithin the scope of the invention, as defined by the appended claims.

1. A method of forming an isolation structure comprising: forming arecess within a substrate; depositing an insulating liner within therecess; exposing the recess to a plasma process after depositing theinsulating liner to form a silicon rich layer at a base of the recess;depositing a spin-on deposition (SOD) precursor after exposing therecess to the plasma process; and converting the SOD precursor to aninsulating layer, wherein converting the SOD precursor includesexpanding the silicon rich layer.
 2. The method of claim 1, whereinexposing the recess to the plasma process comprises depositing a siliconlayer at the base of the recess.
 3. The method of claim 1, whereindepositing an insulating liner comprises depositing a silicon nitrideliner layer.
 4. The method of claim 3, wherein exposing the recess tothe plasma process comprises gettering nitrogen from the silicon nitrideliner layer at the base of the recess to form the silicon rich layer. 5.The method of claim 1, further comprising forming a thin thermal oxidelayer lining the recess before depositing the insulating liner.
 6. Anelectrical isolation structure comprising: a trench formed in asubstrate, wherein the trench has walls and a base; a thermal oxidelining the trench, wherein the thermal oxide is substantially thinneralong the walls than along the base; and a spin-on dielectric over thethermal oxide.
 7. The structure of claim 6, wherein the thermal oxidehas a thickness along the walls of less than 33% of a thickness of thethermal oxide along the base.
 8. The structure of claim 6, wherein thethermal oxide is substantially free of nitrogen.
 9. The structure ofclaim 6, wherein the spin-on dielectric comprises silicon oxide.
 10. Thestructure of claim 9, wherein the spin-on dielectric further comprisesnitrogen.
 11. The structure of claim 6, further comprising a siliconnitride layer lining the trench.
 12. The structure of claim 11, whereinthe silicon nitride layer has a thickness of between about 50 Å and 100Å.
 13. The structure of claim 12, wherein the silicon nitride layer hasa thickness of between about 65 Å and 75 Å.
 14. The structure of claim11, further comprising a uniformly thick thermal oxide layer between thesubstrate and the silicon nitride layer.
 15. The structure of claim 6,wherein the trench has a depth of between about 1,000 Å and 10,000 Å.16. The structure of claim 15, wherein the trench has a depth of betweenabout 2,500 Å and 6,000 Å.
 17. The structure of claim 6, wherein thethermal oxide has a thickness at the base of the trench of between about50 Å and 250 Å.
 18. The structure of claim 17, wherein the thermal oxidehas a thickness at the base of the trench of between about 100 Å and 150Å.
 19. The structure of claim 6, wherein the spin-on oxide has athickness of between about 2000 Å and 4000 Å.
 20. The structure of claim19, wherein the spin-on oxide has a thickness of between about 3000 Åand 3500 Å.
 21. A method of forming a computer memory device comprising:forming a trench in a substrate; anisotropically depositing asilicon-based layer along a base of the trench; depositing an insulatormaterial into the trench after depositing the silicon-based layer; andconverting the silicon-based layer at least partially into silicon oxideduring or after depositing the insulator material.
 22. The method ofclaim 21, wherein depositing the insulator material comprises:depositing a spin-on deposition (SOD) dielectric precursor; andconverting the SOD precursor to a solid insulator.
 23. The method ofclaim 21, wherein anisotropically depositing the silicon-based layercomprises using a plasma deposition process.
 24. The method of claim 21,wherein anisotropically depositing the silicon-based layer comprisesdepositing polysilicon.
 25. The method of claim 21, whereinanisotropically depositing the silicon-based layer comprises depositingamorphous silicon.
 26. The method of claim 21, wherein depositing thesilicon-based layer comprises depositing silicon oxide with a siliconpercentage greater than a silicon percentage in stoichiometric siliconoxide.
 27. The method of claim 21, further comprising forming at leastone insulating layer to line the trench before depositing thesilicon-based layer.
 28. The method of claim 27, wherein forming atleast one insulating layer comprises forming a thermal oxide layerlining the trench and a nitride layer over the thermal oxide layer. 29.A method of improving density of a spin-on dielectric comprising:providing a liner within a recess in a substrate; depositing silicon onat least part of the liner using a primarily anisotropic plasmadeposition process; and depositing a spin-on deposition (SOD) dielectricprecursor within the liner.
 30. The method of claim 29, whereindepositing the SOD precursor comprises depositing a polysilazane basedSOD material.
 31. The method of claim 29, wherein depositing the SODprecursor comprises depositing a silsesquioxane based SOD material. 32.The method of claim 31, wherein depositing the SOD precursor comprisesdepositing a hydrogen silsesquioxane based SOD material.
 33. The methodof claim 31, wherein depositing the SOD precursor comprises depositing amethyl silsesquioxane based SOD material.
 34. The method of claim 29,wherein providing the liner comprises depositing a silicon nitridelayer.
 35. The method of claim 29, wherein depositing silicon comprisesdepositing polysilicon.
 36. The method of claim 29, wherein depositingsilicon comprises depositing amorphous silicon.
 37. An integratedcircuit having an electrical isolation structure comprising: a trenchformed in a recess; an insulating liner over a floor and sidewalls ofthe trench; a thermal oxide layer preferentially formed on the floor ofthe trench; and a spin-on deposition dielectric over the thermal oxidelayer within the trench.
 38. The integrated circuit of claim 37, whereinthe thermal oxide is substantially free of nitrogen.
 39. The integratedcircuit of claim 37, wherein the thermal oxide extends over the floorand sidewalls of the trench, the thermal oxide being thinner over thesidewalls than over the floor.
 40. The integrated circuit of claim 39,wherein the thermal oxide over the sidewalls is less than one third asthick as the thermal oxide over the floor.
 41. The integrated circuit ofclaim 40, wherein the thermal oxide over the sidewalls is less than onefifth as thick as the thermal oxide over the floor.
 42. The integratedcircuit of claim 37, wherein the spin-on deposition dielectric comprisessilicon oxide.